gmane.science.microelectromechanical-systems

MEMS Express from MNX

MEMS News — 2013-05-21T19:58:09

View Mailing Online [url: http://www.memsnet.org/news/mailings/899/]


MEMS Express is brought to you by MNX [url: http://www.mems-exchange.org]:
your microsystem design and fabrication partner



MEMS technology

Integrating sensor data acquisition in mobile applications
For example, micro-electro-mechanical systems (MEMS)-based sensors can
be embedded with the corresponding digital signal processing block, thus
integrating the complete chain in a single die. Regardless of the
implementation choice, the data converter ... yesterday Chip Design Magazine
[url: http://chipdesignmag.com/display.php?articleId=5253]

An Overview of Laser Micromachining For Industrial Applications - AZoM
Laser Cheval, a pioneer in its field has specialized for almost 40 years
in the construction and design of laser machines for micromachining. The
company is located in the center of France&#39;s micro-engineering industry
and is the first French ... today Azom.com
[url: http://www.azom.com/article.aspx?ArticleID=8921]

Columbia Engineering Researchers Use Miniaturized Electronics for Measuring ...
&quot;By designing a custom microelectronic amplifier and tightly integrating
the ion channel directly onto the amplifier chip surface, we are able to
reduce stray capacitances that get in the way of making fast
measurements.&quot; &quot;This work builds on other ... today AZoNano.com
[url: http://www.azonano.com/news.aspx?newsID=27411]

CMOS chip transformed into nanopore sensor
By suspending the oxide layer, using microfabrication techniques,
freestanding membranes were formed. To their surprise the group
discovered that oxides available in CMOS on-chip capacitors were very
leaky, preventing their direct use. The researchers ... today nanotechweb.org
[url: http://nanotechweb.org/cws/article/lab/53503]

DVD optics for on-the-spot HIV testing
&quot;This is very active field of research, and there are many companies
with commercial products using centrifugal microfluidics in CD format to
manipulate minute amounts of liquids,&quot; commented Russom to Optics.org. &quot;A
fundamental difference with our ... today Optics.org
[url: http://optics.org/news/4/5/29]




Nanotechnology

Study provides better understanding of water&amp;#39;s freezing behavior at nanoscale
The results of a new study led by George Washington University Professor
Tianshu Li provide direct computational evidence that nucleation of ice
in small droplets is strongly size-dependent, an important conclusion in
understanding water&#39;s behavior at ... today Phys.Org
[url: http://phys.org/news/2013-05-behavior-nanoscale.html]

New advance in nanotechnology gene sequencing technique - Nanowerk
(Nanowerk News) The allure of personalized medicine has made new, more
efficient ways of sequencing genes a top research priority. One
promising technique involves reading DNA bases using changes in
electrical current as they are threaded through a ... yesterday Nanowerk
[url: http://www.nanowerk.com/news2/newsid=30575.php]

Nanotechnology surface architecture for bio applications - Nanowerk
A new article in Advanced Functional Materials (&quot;Surface
Nanoarchitecture for Bio-Applications: Self-Regulating Intelligent
Interfaces&quot;) by Ekaterina V. Skorb and Daria V. Andreeva highlights the
latest achievements in construction of nanotechnology ... today Nanowerk
[url: http://www.nanowerk.com/news2/newsid=30588.php]

Getting &amp;#39;Kinky&amp;#39;: Nanoscale Atomic Interfaces Have Serious Flaws
Forming these coherent twin boundaries at the nanoscale in materials
like gold and copper makes them not only stronger, but also more
malleable and durable. The metals were also shown to become more
conductive as well, greatly increasing their ... yesterday TechNewsDaily
[url: http://www.technewsdaily.com/18121-getting-kinky-nanoscale-atomic-interfaces-have-serious-flaws.html]





Featured Event

International Microwave Symposium (IMS)[1] The IEEE MTT International
Microwave Symposium is the premier annual international meeting for
technologists involved in all aspects of microwave theory and practice.
It consists of a full week of events, including technical paper
presentations, workshops, and tutorials, as well as a full set of social
events. The symposium also hosts a huge commercial exhibition, organized
by MP Associates.

MEMS Event Calendar:

11th Annual MEPTEC MEMS Technology Symposium
[url: http://meptec.org/meptec11thannual.html]
2013-05-22
San Jose, CA
MEMS-enabled e-health revolution !

Workshop on Nano and Micro Manufacturing
[url: http://nano-microworkshop.com]
2013-05-22 - 2013-05-23
Dearborn, MI
Nano and micro workshop concentrating on end users and manufacturers

MEMS Business Forum 2013
[url: http://memsforum2013.com/index.html]
2013-05-23
San Jose, CA

ECTC 2013 (Electronic Components and Technology Conference)
[url: http://www.ectc.net/]
2013-05-28 - 2013-05-31
Las Vegas, NV

EIPBN (3-Beams) Conference
[url: http://eipbn.org/home-page/]
2013-05-28 - 2013-05-31
Nashville, TN

Design Automation Conference (DAC) 2013
[url: http://www.dac.com/default.aspx?utm_source=MEMS&amp;utm_medium=banner&amp;utm_content=125x60&amp;utm_campaign=Registration]
2013-06-02 - 2013-06-06
Austin, Texas
Celebrating 50 Years ! 

International Microwave Symposium (IMS)
[url: http://www.ims2013.org/]
2013-06-02 - 2013-06-07
Seattle, Washington
Join top engineers and scientists in the RF &amp; Microwave Field at IMS!

Sensors Expo and Conference
[url: http://www.sensorsmag.com/sensors-expo]
2013-06-05 - 2013-06-06
Rosemont, IL 
Sensing Technologies Driving Tomorrow&#39;s Solutions

Transducers  2013 &amp; Eurosensors XXVII
[url: http://transducers-eurosensors2013.org/]
2013-06-16 - 2013-06-20
Barcelona, Spain
The 17th International Conference on Solid-State Sensors, Actuators and Microsystems

Micro- and Nano-electromechanical Switches
[url: http://www.memsindustrygroup.org/i4a/pages/index.cfm?pageid=3446]
2013-06-18
Online 11:30 AM ET, 8:30 AM PT
A Detailed Look into these Promising Technologies

AVS 60th International Symposium &amp; Exhibition
[url: http://www2.avs.org/symposium/AVS60/pages/call_abstract.html]
2013-10-27 - 2013-11-01
Long Beach, CA

MicroTAS 2013
[url: http://www.microtas2013.org/]
2013-10-27 - 2013-10-31
Freiburg, Germany
The 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences

MIG MEMS Executive Congress U.S.
[url: http://www.memscongress.com]
2013-11-07 - 2013-11-08
Napa, CA
Meet your next customer at MEMS Executive Congress! 

SPIE Photonics West 2014
[url: http://spie.org/RPW142MEMBVE]
2014-02-01 - 2014-02-06
San Francisco, CA

MEMS Express from MNX

MEMS News — 2013-05-20T18:28:52

View Mailing Online [url: http://www.memsnet.org/news/mailings/898/]


MEMS Express is brought to you by MNX [url: http://www.mems-exchange.org]:
your microsystem design and fabrication partner



MEMS technology

MEMS Vision combines silicon technolgy with SiC for sensors
The MVH3000D product line of tiny chips is designed to fulfil the needs
of a wide range of applications and markets. These include consumer
electronics, health &amp; fitness, industrial, building automation,
appliances, and wireless sensing (the internet ... today Compound Semiconductor
[url: http://www.compoundsemiconductor.net/csc/news-details/id/19736371/name/MEMS-Vision-combines-silicon-technolgy-with-SiC-for-sensors.html]

Slideshow: Energy Harvesters Lift Power From Surprising Sources
Bolt works using a piezoelectric microelectromechanical system that
creates energy from vibrations in the environment. Those vibrations
cause a flap on the device to move back and forth, creating a current
that creates energy that&#39;s stored in a ... today Design News
[url: http://www.designnews.com/author.asp?section_id=1386&amp;doc_id=263386&amp;f_src=designnews_gnews]

It&amp;#39;s Still About the Battery
Moore&#39;s Law is about manufacturing -- pushing the state of the art by
reducing the feature sizes of microelectronic devices. Batteries, on the
other hand, pose a science challenge. Making them better is more like
curing cancer. That&#39;s not to say we won ... 2013-05-17 Design News
[url: http://www.designnews.com/author.asp?section_id=1366&amp;doc_id=263456&amp;f_src=designnews_gnews]




Nanotechnology

Very Fine Art: 6 Stunningly Beautiful Nanoscale Sculptures [Slide ...
Researchers coax self-assembling materials into flowers, corals and
other complex shapes. yesterday
[url: http://www.scientificamerican.com/article.cfm?id=very-fine-art-6-stunningly-beautiful-nanoscale-sculptures-slide-show]

Kinks and curves at the nanoscale: New research shows &amp;#39;perfect twin ...
Abstract: One of the basic principles of nanotechnology is that when you
make things extremely small—one nanometer is about five atoms wide,
100,000 times smaller than the diameter of a human hair—they are going
to become more perfect. today Nanotechnology News (press release)
[url: http://www.nanotech-now.com/news.cgi?story_id=47489]

Nanotechnology Advances Solar Photovoltaics - AZoNano
In this scenario, Aruvian&#39;s R&#39;search brings to you its research report -
Nanotech: Making Photovoltaics Possible. This research report takes a
look at how nanotechnology is changing the world of solar photovoltaics
and making possible advances which ... today AZoNano.com
[url: http://www.azonano.com/news.aspx?newsID=27396]


Nanotech business

NanoInk, Inc. Assets To Be Sold
Moglia Advisors announces an extraordinary acquisition opportunity for
an acquisition of equipment and intellectual property in the areas of
nano scale brand protection, with FDA approval having been obtained as a
&quot;CBE 30&quot; for certain pharmaceutical applications, the life sciences and
advanced materials production, as well as education, electronics and
engineering processes. 2013-05-18 Nanotechnology News (press release)
[url: http://www.nanotech-now.com/news.cgi?story_id=47487]



Featured Event

AVS 60th International Symposium &amp; Exhibition[1] The AVS International
Symposium and Exhibition addresses cutting-edge issues associated with
materials, processing, and interfaces in both the research and
manufacturing communities. The weeklong Symposium fosters a
multidisciplinary environment that cuts across traditional boundaries
between disciplines, featuring papers from AVS technical divisions,
technology groups, and focus topics on emerging technologies. The
equipment exhibition is one of the largest in the world and provides an
excellent opportunity to view the latest products and services offered
by over 200 participating companies. More than 2,000 scientists and
engineers gather from around the world to attend.

MEMS Event Calendar:

11th Annual MEPTEC MEMS Technology Symposium
[url: http://meptec.org/meptec11thannual.html]
2013-05-22
San Jose, CA
MEMS-enabled e-health revolution !

Workshop on Nano and Micro Manufacturing
[url: http://nano-microworkshop.com]
2013-05-22 - 2013-05-23
Dearborn, MI
Nano and micro workshop concentrating on end users and manufacturers

MEMS Business Forum 2013
[url: http://memsforum2013.com/index.html]
2013-05-23
San Jose, CA

ECTC 2013 (Electronic Components and Technology Conference)
[url: http://www.ectc.net/]
2013-05-28 - 2013-05-31
Las Vegas, NV

EIPBN (3-Beams) Conference
[url: http://eipbn.org/home-page/]
2013-05-28 - 2013-05-31
Nashville, TN

Design Automation Conference (DAC) 2013
[url: http://www.dac.com/default.aspx?utm_source=MEMS&amp;utm_medium=banner&amp;utm_content=125x60&amp;utm_campaign=Registration]
2013-06-02 - 2013-06-06
Austin, Texas
Celebrating 50 Years ! 

International Microwave Symposium (IMS)
[url: http://www.ims2013.org/]
2013-06-02 - 2013-06-07
Seattle, Washington
Join top engineers and scientists in the RF &amp; Microwave Field at IMS!

Sensors Expo and Conference
[url: http://www.sensorsmag.com/sensors-expo]
2013-06-05 - 2013-06-06
Rosemont, IL 
Sensing Technologies Driving Tomorrow&#39;s Solutions

Transducers  2013 &amp; Eurosensors XXVII
[url: http://transducers-eurosensors2013.org/]
2013-06-16 - 2013-06-20
Barcelona, Spain
The 17th International Conference on Solid-State Sensors, Actuators and Microsystems

Micro- and Nano-electromechanical Switches
[url: http://www.memsindustrygroup.org/i4a/pages/index.cfm?pageid=3446]
2013-06-18
Online 11:30 AM ET, 8:30 AM PT
A Detailed Look into these Promising Technologies

AVS 60th International Symposium &amp; Exhibition
[url: http://www2.avs.org/symposium/AVS60/pages/call_abstract.html]
2013-10-27 - 2013-11-01
Long Beach, CA

MicroTAS 2013
[url: http://www.microtas2013.org/]
2013-10-27 - 2013-10-31
Freiburg, Germany
The 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences

MIG MEMS Executive Congress U.S.
[url: http://www.memscongress.com]
2013-11-07 - 2013-11-08
Napa, CA
Meet your next customer at MEMS Executive Congress! 

SPIE Photonics West 2014
[url: http://spie.org/RPW142MEMBVE]
2014-02-01 - 2014-02-06
San Francisco, CA

MEMS Express from MNX

MEMS News — 2013-05-17T19:21:35

View Mailing Online [url: http://www.memsnet.org/news/mailings/897/]


MEMS Express is brought to you by MNX [url: http://www.mems-exchange.org]:
your microsystem design and fabrication partner



MEMS technology

LAST POWER to boost SiC &amp;amp; GaN power microelectronics
The consortium members are STMicroelectronics (Italy), project
coordinator, LPE/ETC (Italy), Institute for Microelectronics and
Microsystems of the National Research Council - IMM-CNR (Italy),
Foundation for Research &amp; Technology-Hellas - FORTH (Greece ... today Compound Semiconductor
[url: http://www.compoundsemiconductor.net/csc/news-details/id/19736362/name/LAST-POWER-to-boost-SiC-&amp;-GaN-power-microelectronic.html]

ULIS Launches Thermal Sensor Array Product Line, within Scope of European ...
Led by ULIS, MIRTIC project partners include: CEA-Leti, a leading
microelectronic and nanotechnology research center, Integrated Systems
Development, a global systems integrator, Metaio, a developer of
augmented reality technology and Schneider ... yesterday ThomasNet Industrial News Room (press release)
[url: http://news.thomasnet.com/companystory/ULIS-Launches-Thermal-Sensor-Array-Product-Line-within-Scope-of-European-MIRTIC-Project-20008394]

Velocitip System by Full Flight Technology, a New Archery Industry Standard
A ruggedized 100-grain field point houses the innovative microelectronic
technology that is the heart of the system. The electronic field point
fits any arrow shaft using a conventional threaded insert. The
electronics activate when the arrow leaves ... today AmmoLand.com (press release)
[url: http://www.ammoland.com/2013/05/velocitip-system-by-full-flight-technology/]

First precise MEMS output measurement technique unveiled - SpaceDaily
The commercial application of MEMS, or micro-electro-mechanical systems,
will receive a major boost following the presentation of a brand new way
to accurately measure the power requirements and outputs of all existing
and future devices. The cheap and ... today Space Daily
[url: http://www.spacedaily.com/reports/First_precise_MEMS_output_measurement_technique_unveiled_999.html]

MEMS Vision Announces its Next Generation MVH3000D Product Line of Very ...
The versatility and quality of this new product line positions MEMS
Vision as an industry leader in RH&amp;T sensing, and makes them the ideal
partner for a wide range of applications and markets, such as consumer
electronics, health &amp; fitness, industrial, ... today PR Web (press release)
[url: http://www.prweb.com/releases/Mems-Vision/MVH3000D-Series/prweb10740522.htm]

Resist Processing System supports micro- and nano-electronics.
SINGAPORE, -- SEMICON SINGAPORE -- EV Group (EVG), a leading supplier of
wafer bonding and lithography equipment for the MEMS, nanotechnology and
semiconductor markets, today introduced the latest version of its
EVG(®)120 automated resist ... today ThomasNet Industrial News Room
[url: http://news.thomasnet.com/fullstory/Resist-Processing-System-supports-micro-and-nano-electronics-20008179]

Photovoltaic materials and manufacturing
There is an exciting development from Sandia National Laboratories,
which has developed a microsystems-enabled photovoltaic (MEPV) solar
cell combined with a microlens array concentrator in a robust module
package that can be produced using existing ... today AltEnergyMag (press release)
[url: http://www.altenergymag.com/news/2013/05/16/photovoltaic-materials-and-manufacturing/29380]




Nanotechnology

Nanoscale friction could lead to surface improvement
Scientists from the Technische Universitaet Muenchen (TUM) have observed
a previously unknown type of friction that occurs at the nanoscale. In
search of low-friction components for nanosystems, the physicists led by
professors Thorsten Hugel and ... yesterday The Engineer
[url: http://www.theengineer.co.uk/channels/design-engineering/news/nanoscale-friction-could-lead-to-surface-improvement/1016328.article]

Nano Labs Develops Nanotechnology to Convert Eggshells into Hydroxyapatite
Nano Labs Corp. is pleased to announce today the development of a new
nanotechnology to convert eggshells into hydroxyapatite, which is a
material employed for endodontics, restorative dentistry and other
applications in orthopedics and prosthesis. today AZoNano.com
[url: http://www.azonano.com/news.aspx?newsID=27379]

Injectable Nanogel Monitors Blood-Sugar Levels
Researchers at the Massachusetts Institute of Technology (MIT) have
developed an injectable nanogel that can monitor blood-sugar levels and
secrete insulin when needed, a breakthrough that could someday eliminate
the need for patients with Type 1 ... today RedOrbit
[url: http://www.redorbit.com/news/health/1112850014/diabetes-insulin-blood-glucose-injectable-nanogel-051713/]

DNA-Guided Assembly Yields Novel Ribbon-Like Nanostructures: Approach ...
Scientists at the U.S. Department of Energy&#39;s Brookhaven National
Laboratory have discovered that DNA &quot;linker&quot; strands coax nano-sized
rods to line up in way unlike any other spontaneous arrangement of
rod-shaped objects. The arrangement-with the rods forming &quot;rungs&quot; on
ladder-like ribbons linked by multiple DNA strands-results from the
collective interactions of the flexible DNA tethers and may be unique to
the nanoscale. yesterday Nanotechnology News (press release)
[url: http://www.nanotech-now.com/news.cgi?story_id=47478]





Featured Event

11th Annual MEPTEC MEMS Technology Symposium[1] MEMS-enabled e-Health
Revolution! MEMS and NEMS based applications for emerging healthcare
off-body, on-body and in-body

MEMS Event Calendar:

11th Annual MEPTEC MEMS Technology Symposium
[url: http://meptec.org/meptec11thannual.html]
2013-05-22
San Jose, CA
MEMS-enabled e-health revolution !

Workshop on Nano and Micro Manufacturing
[url: http://nano-microworkshop.com]
2013-05-22 - 2013-05-23
Dearborn, MI
Nano and micro workshop concentrating on end users and manufacturers

MEMS Business Forum 2013
[url: http://memsforum2013.com/index.html]
2013-05-23
San Jose, CA

ECTC 2013 (Electronic Components and Technology Conference)
[url: http://www.ectc.net/]
2013-05-28 - 2013-05-31
Las Vegas, NV

EIPBN (3-Beams) Conference
[url: http://eipbn.org/home-page/]
2013-05-28 - 2013-05-31
Nashville, TN

Design Automation Conference (DAC) 2013
[url: http://www.dac.com/default.aspx?utm_source=MEMS&amp;utm_medium=banner&amp;utm_content=125x60&amp;utm_campaign=Registration]
2013-06-02 - 2013-06-06
Austin, Texas
Celebrating 50 Years ! 

International Microwave Symposium (IMS)
[url: http://www.ims2013.org/]
2013-06-02 - 2013-06-07
Seattle, Washington
Join top engineers and scientists in the RF &amp; Microwave Field at IMS!

Sensors Expo and Conference
[url: http://www.sensorsmag.com/sensors-expo]
2013-06-05 - 2013-06-06
Rosemont, IL 
Sensing Technologies Driving Tomorrow&#39;s Solutions

Transducers  2013 &amp; Eurosensors XXVII
[url: http://transducers-eurosensors2013.org/]
2013-06-16 - 2013-06-20
Barcelona, Spain
The 17th International Conference on Solid-State Sensors, Actuators and Microsystems

Micro- and Nano-electromechanical Switches
[url: http://www.memsindustrygroup.org/i4a/pages/index.cfm?pageid=3446]
2013-06-18
Online 11:30 AM ET, 8:30 AM PT
A Detailed Look into these Promising Technologies

AVS 60th International Symposium &amp; Exhibition
[url: http://www2.avs.org/symposium/AVS60/pages/call_abstract.html]
2013-10-27 - 2013-11-01
Long Beach, CA

MicroTAS 2013
[url: http://www.microtas2013.org/]
2013-10-27 - 2013-10-31
Freiburg, Germany
The 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences

MIG MEMS Executive Congress U.S.
[url: http://www.memscongress.com]
2013-11-07 - 2013-11-08
Napa, CA
Meet your next customer at MEMS Executive Congress! 

SPIE Photonics West 2014
[url: http://spie.org/RPW142MEMBVE]
2014-02-01 - 2014-02-06
San Francisco, CA

MEMS Express from MNX

MEMS News — 2013-05-16T21:26:05

View Mailing Online [url: http://www.memsnet.org/news/mailings/896/]


MEMS Express is brought to you by MNX [url: http://www.mems-exchange.org]:
your microsystem design and fabrication partner



MEMS technology

UV Laser delivers greater than 45 W output.
Spectra-Physics&#39; new laser has been demonstrated to enable major
advances in the fast, precision manufacturing of many types of
microelectronic devices and components. “With over 10,000 UV lasers
deployed, Spectra-Physics is the leader in UV lasers, ... yesterday ThomasNet Industrial News Room
[url: http://news.thomasnet.com/fullstory/UV-Laser-delivers-greater-than-45-W-output-20008294]

Tech Gets Phones On Your Wavelength
In work to be presented in June at the International Conference on
Solid-State Sensors, Actuators and Microsystems, Dana Weinstein,
professor of electrical engineering and computer science, and Laura
Popa, a graduate student in physics, built a ... today Discovery News
[url: http://news.discovery.com/tech/gear-and-gadgets/tech-gets-phones-on-your-wavelength-130516.htm]


MEMS business

InvenSense shares up on Apple rumors
THE BIG PICTURE: InvenSense, based in Sunnyvale, Calif., makes
micro-electro-mechanical systems gyroscopes used for motion tracking
devices in consumer electronics. It earned $51.7 million, or 59 cents
per share, in its most recent fiscal year on ... yesterday Yahoo! News
[url: http://news.yahoo.com/invensense-shares-apple-rumors-193834630.html]

Azoteq Announces Pricing Breakthrough for Capacitive Switches - PRWeb
R&amp;D in novel micro-electronic designs allows for this groundbreaking
sensitivity whilst maintaining industry-leading ESD immunity and low
current consumption. “Azoteq&#39;s industry-leading sensitivity and
robustness enable many new applications for ... today PR Web (press release)
[url: http://www.prweb.com/releases/2013/5/prweb10737293.htm]

ST launches MEMS sensor design contest in Taiwan
It is the third time ST is running the competition for students and
young engineers in Taiwan to design new applications built around ST&#39;s
iNEMO MEMS-based multi-sensor technology. This year&#39;s contest encourages
contestants to use sensing technologies ... yesterday ElectronicsWeekly.com
[url: http://www.electronicsweekly.com/news/components/analogue-and-discretes/st-launches-mems-sensor-design-contest-in-taiwan-2013-05/]

HELIOS Program Develops Supply Chain for Integrating Photonics with CMOS ...
Silicon photonics is seen as key to developing optical
telecommunications or for optical interconnects in microelectronic
circuits because of the cost advantages of integrating photonic and
electronic functions on the same chip. CMOS photonics may lead ... yesterday Novus Light Technologies Today
[url: http://www.novuslight.com/helios-program-develops-supply-chain-for-integrating-photonics-with-cmos-circuits_N1186.html]

The DOE Joint Genome Institute expands capabilities via new partnerships - Phys
&quot;High-throughput sorting of microbial cells with specific functional
traits for single cell genomics by combining labeling with heavy water,
Raman microspectroscopy, microfluidics and flow cytometry,&quot; proposed by
Roman Stocker of MIT and Michael Wagner ... yesterday Phys.Org (press release)
[url: http://phys.org/wire-news/130089995/the-doe-joint-genome-institute-expands-capabilities-via-new-part.html]

MEMS Industry Group Explores Trends and Techniques in Sensor Fusion at ...
PITTSBURGH--(BUSINESS WIRE)--MEMS Industry Group® (MIG), the industry
organization advancing micro-electromechanical systems (MEMS) across
global markets, today announced its conference and exposition line-up
for the 2013 Sensors Expo ... yesterday EON: Enhanced Online News (press release)
[url: http://eon.businesswire.com/news/eon/20130515005281/en/MEMS/MEMS-Industry-Group/MIG]

Annual sales records continue for Acceleration/Yaw sensors - Electronicsfeed
Despite slower growth, acceleration/yaw sensors—which are accelerometers
and gyroscope devices primarily made with microelectromechanical systems
(MEMS) technology—reached record-high sales of $2.54 billion in 2012,
surpassing the previous peak ... today electronicsfeed.com
[url: http://electronicsfeed.com/news/4262]


Nanotechnology

Nanoscale holes ripped in bacteria to prevent infection - Nanowerk
A research team consisting of scientists from the London Centre for
Nanotechnology (LCN), National Physical Laboratory, University of
Edinburgh, University of Oxford, Freie Universität Berlin and IBM, have
now used a combination of nanoscale imaging, ... today Nanowerk
[url: http://www.nanowerk.com/news2/newsid=30528.php]

Physicists let magnetic dipoles interact on the nanoscale for the first time
Physicists Let Magnetic Dipoles Interact On the Nanoscale for the First
Time. May 15, 2013 — Physicists at the Ruhr-Universität Bochum (RUB)
have found out how tiny islands of magnetic material align themselves
when sorted on a regular lattice -- by ... yesterday Science Daily (press release)
[url: http://www.sciencedaily.com/releases/2013/05/130515151548.htm]

The paper is the circuit: scientists create graphite-based paper circuitry ...
... is already also used in the manufacturing of carbon nanotubes. More
experimentation and a better understanding could potentially lead to
transforming paper-based structures into the atom-thick wonder
nanomaterial, graphene. Source: Max Planck ... today Gizmag
[url: http://www.gizmag.com/paper-graphite-flexible-circuits/27545/]

The Science Behind A Self-assembled Nano-carbon Helix
Scientists have now succeeded in growing a unique carbon structure at
the nanoscale that resembles a tiny twirled moustache. Their method
might lead the way to the formation of more complex nano-networks.
Researchers of the Electronic Properties of ... today RedOrbit
[url: http://www.redorbit.com/news/science/1112848929/science-behind-self-assembled-nano-carbon-helix-051613/]

Graphene Study Confirms 40-Year-Old Physics Prediction - Newswise
... mechanical engineering (James Hone), and electrical engineering
(Kenneth Shepard) in the new Northwest Corner building, using the
facilities in the CEPSR (Columbia&#39;s Schapiro Center for Engineering and
Physical Science Research) microfabrication ... today Newswise (press release)
[url: http://newswise.com/articles/graphene-study-confirms-40-year-old-physics-prediction?ret=/articles/list&amp;category=science&amp;page=1&amp;search%5Bstatus%5D=3&amp;search%5Bsort%5D=date+desc&amp;search%5Bsection%5D=20&amp;search%5Bhas_multimedia%5D=]


Nanotech business

An inside look at the world&amp;#39;s newest quantum computing and nanotechnology ...
Inside, your mobile phone doesn&#39;t work. You don&#39;t feel any outside noise
or vibrations, even if a freight train passes just a few feet away, and
you need three months of training just to get into the nanotech clean
room where molecular assembly happens. yesterday VentureBeat
[url: http://venturebeat.com/2013/05/15/an-inside-look-at-the-worlds-newest-quantum-computing-and-nanotechnology-center/]

New Report on the Global Nanotechnology Market - AZoNano
Nanotechnology has been the greatest impetus to technological and
industrial development in the 21st century and has been recognized as
the resource for the next industrial revolution. The evolving technology
has already influenced a large number of ... today AZoNano.com
[url: http://www.azonano.com/news.aspx?newsID=27365]



Featured Event

SPIE MOEMS-MEMS[1]Call for Papers for SPIE MOEMS-MEMS, part of SPIE
Photonics West, on the latest optical MEMs, biomedical MEMs and sensors,
microfluidics, MEMs, MOEMs, micro-optics, adaptive optics research. This
conference explores how MEMS and MOEMS will enable the mass-produced
miniaturized products and integrated systems of the future. SPIE
Photonics West, 1 - 6 February 2014, The Moscone Center, San Francisco,
California, United States. Learn more at: http://spie.org[2].

MEMS Event Calendar:

11th Annual MEPTEC MEMS Technology Symposium
[url: http://meptec.org/meptec11thannual.html]
2013-05-22
San Jose, CA
MEMS-enabled e-health revolution !

Workshop on Nano and Micro Manufacturing
[url: http://nano-microworkshop.com]
2013-05-22 - 2013-05-23
Dearborn, MI
Nano and micro workshop concentrating on end users and manufacturers

MEMS Business Forum 2013
[url: http://memsforum2013.com/index.html]
2013-05-23
San Jose, CA

ECTC 2013 (Electronic Components and Technology Conference)
[url: http://www.ectc.net/]
2013-05-28 - 2013-05-31
Las Vegas, NV

EIPBN (3-Beams) Conference
[url: http://eipbn.org/home-page/]
2013-05-28 - 2013-05-31
Nashville, TN

Design Automation Conference (DAC) 2013
[url: http://www.dac.com/default.aspx?utm_source=MEMS&amp;utm_medium=banner&amp;utm_content=125x60&amp;utm_campaign=Registration]
2013-06-02 - 2013-06-06
Austin, Texas
Celebrating 50 Years ! 

International Microwave Symposium (IMS)
[url: http://www.ims2013.org/]
2013-06-02 - 2013-06-07
Seattle, Washington
Join top engineers and scientists in the RF &amp; Microwave Field at IMS!

Sensors Expo and Conference
[url: http://www.sensorsmag.com/sensors-expo]
2013-06-05 - 2013-06-06
Rosemont, IL 
Sensing Technologies Driving Tomorrow&#39;s Solutions

Transducers  2013 &amp; Eurosensors XXVII
[url: http://transducers-eurosensors2013.org/]
2013-06-16 - 2013-06-20
Barcelona, Spain
The 17th International Conference on Solid-State Sensors, Actuators and Microsystems

Micro- and Nano-electromechanical Switches
[url: http://www.memsindustrygroup.org/i4a/pages/index.cfm?pageid=3446]
2013-06-18
Online 11:30 AM ET, 8:30 AM PT
A Detailed Look into these Promising Technologies

AVS 60th International Symposium &amp; Exhibition
[url: http://www2.avs.org/symposium/AVS60/pages/call_abstract.html]
2013-10-27 - 2013-11-01
Long Beach, CA

MicroTAS 2013
[url: http://www.microtas2013.org/]
2013-10-27 - 2013-10-31
Freiburg, Germany
The 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences

MIG MEMS Executive Congress U.S.
[url: http://www.memscongress.com]
2013-11-07 - 2013-11-08
Napa, CA
Meet your next customer at MEMS Executive Congress! 

SPIE Photonics West 2014
[url: http://spie.org/RPW142MEMBVE]
2014-02-01 - 2014-02-06
San Francisco, CA

Re: [mems-talk] EEG Devices and Sensors

Michael Martin — 2013-05-16T14:11:01

Hi Anton,
   Yes, there are a number of commercial systems.  See
http://www.emotiv.com/ they have a whole headset.  There's also a really
interesting TED talk about a mind-reading headset -
http://www.youtube.com/watch?v=fVhggGSjXVg

Cheers,
  Michael


On Wed, May 15, 2013 at 8:21 PM, masgandhul <masgandhul< at >gmail.com> wrote:

_______________________________________________
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[mems-talk] EEG Devices and Sensors

masgandhul — 2013-05-16T00:21:31

Hello everyone,

I'm a new member here, I did not know however, my question had been
asked before.

Is there any or many devices or sensors that able to handle EEG for
full head reading? not only in some part of our head, but for the
whole head.

Thank you

MEMS Express from MNX

MEMS News — 2013-05-15T20:07:59

View Mailing Online [url: http://www.memsnet.org/news/mailings/895/]


MEMS Express is brought to you by MNX [url: http://www.mems-exchange.org]:
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MEMS technology

ULIS Launches Thermal Sensor Array Product Line, Within Scope Of European ...
Led by ULIS, MIRTIC project partners include: CEA-Leti, a leading
microelectronic and nanotechnology research center, Integrated Systems
Development, a global systems integrator, Metaio, a developer of
augmented reality technology and Schneider ... today Photonics Online
[url: http://www.photonicsonline.com/Doc/ulis-thermal-sensor-array-product-line-european-mirtic-project-0001]

Solar Panels as Inexpensive as Paint?
... in nanphotonics, biophotonics, hybrid inorganic/organic materials
and devices, nonlinear and fiber optics, metamaterials, nanoplasmonics,
optofluidics, microelectromechanical systems (MEMS), biomedical
microelectromechanical systems (BioMEMs), ... today Lab Manager Magazine
[url: http://www.labmanager.com/?articles.view/articleNo/35574/title/Solar-Panels-as-Inexpensive-as-Paint-/]

First Precise MEMS Output Measurement Technique Unveiled
May 14, 2013 — The commercial application of MEMS, or
micro-electro-mechanical systems, will receive a major boost today
following the presentation of a brand new way to accurately measure the
power requirements and outputs of all existing and future ... yesterday Science Daily (press release)
[url: http://www.sciencedaily.com/releases/2013/05/130514122749.htm]

SMI Implements Centipede&amp;#39;s Massively Parallel Test for MEMS
Silicon Microstructures, Inc. (SMI) a leader in MEMS Pressure Sensors,
announces test-in-tray for parallel testing of MEMS based pressure
sensors in volume production. SMI has put test-in-tray processing into
production for automated handling and testing. today San Francisco Chronicle
[url: http://www.sfgate.com/business/prweb/article/SMI-Implements-Centipede-s-Massively-Parallel-4517436.php]

Semiconductor technology applies thermoset transfer molding
The goal of encapsulation is to protect sensitive semiconductor and
micro-electro-mechanical (MEM) devices from outside forces like
humidity, salt, or other contaminants. Sencio said traditional
encapsulation technologies can deliver excellent ... today Plastics Today
[url: http://www.plasticstoday.com/articles/semiconductor-technology-applies-thermoset-transfer-molding-051520133]

Photonics Integrated with CMOS Under HELIOS Project
Silicon photonics is seen as key to developing future optical
interconnects in microelectronic circuits, as engineers reach the
technical limits of current integrated circuit technology. It is also
essential to developing optical telecommunications ... today Photonics.com
[url: http://www.photonics.com/Article.aspx?AID=53887]

Perfectly designed microelectronics - Science News
Microchips play an important role in industrial and household
electronics. Their miniaturized circuits must not only function
faultlessly but also consume as little energy as possible. Researchers
are now working on making the ... today
[url: http://phys.org/news/2013-05-perfectly-microelectronics.html]


MEMS business

Silex Partners in ENIAC Processes for MEMS by Inkjet Enhanced ...
Silex Microsystems, the world&#39;s largest pure-play MEMS foundry, today
announced that it has joined an international European Union-funded
program aimed at developing a new MEMS manufacturing platform based on
... yesterday
[url: http://www.azonano.com/news.aspx?newsID=27343]

STMicroelectronics offering drivers to interface its MEMS devices to Linux OS
“The ST IIO driver modules also provide the flexibility to exchange all
the ST MEMS devices without any changes at the driver level,” said Paolo
Bendiscioli, Motion MEMS Application Manager at STMicroelectronics.
“This solution allows faster design ... today EE Herald
[url: http://www.eeherald.com/section/new-products/onws2013051508a.html]

VDMA: New “Photonics Industry Report 2013” presented
Economic data of a key technology. - In collaboration with the German
Federal Ministry of Education and Research (BMBF), the industrial
associations VDMA, Spectaris and ZVEI publish a joint study on the
photonics industry. Despite the financial crisis, solid growth of the
high-tech segment since 2005. yesterday Nanotechnology News (press release)
[url: http://www.nanotech-now.com/news.cgi?story_id=47454]

MEMS New Product Development Blog: The technology development process ...
David DiPaola is managing director for DiPaola Consulting, a company
focused on engineering and management solutions for electromechanical
systems, sensors and MEMS products. A 17-year veteran of the field, he
has brought many products from ... yesterday ElectroIQ
[url: http://www.electroiq.com/articles/sst/2013/05/mems-new-product-development-blog--the-technology-development-pr.html]

MEMS Industry Group Explores Trends and Techniques in Sensor Fusion at ...
MEMS Industry Group(R) (MIG), the industry organization advancing
micro-electromechanical systems (MEMS) across global markets, today
announced its conference and exposition line-up for the 2013 Sensors
Expo &amp; Conference, the premier industry ... today Wall Street Journal (press release)
[url: http://online.wsj.com/article/PR-CO-20130515-908518.html?mod=googlenews_wsj]


Nanotechnology

Bright Nanoscale Alloys Have Potential Medical Applications
However, alloys at the nanoscale follow different rules, says Millstone.
Because the nanoparticles are so small, the components often don&#39;t stay
together and instead quickly separate, like oil and vinegar. In her
paper, Millstone describes using small ... today Laboratory Equipment
[url: http://www.laboratoryequipment.com/news/2013/05/bright-nanoscale-alloys-have-potential-medical-applications]

Electrochemical Reactions of Nanoscale Battery Observed Through ...
One of the most promising new kinds of battery to power electric cars is
called a lithium-air battery, which could store up to four times as much
energy per pound as today&#39;s best lithium-ion batteries. But progress has
been slow: ... yesterday
[url: http://www.azonano.com/news.aspx?newsID=27348]

Nanotechnology researchers discover a previously unknown type of friction
(Nanowerk News) Whether in vehicle transmissions, hip replacements, or
tiny sensors for triggering airbags: The respective components must
slide against each other with minimum friction to prevent loss of energy
and material wear. Investigating the ... today Nanowerk
[url: http://www.nanowerk.com/news2/newsid=30507.php]

Chain instead of zigzag: Physicists let magnetic dipoles interact on the nanoscale
(Nanowerk News) Physicists at the Ruhr-Universität Bochum (RUB) have
found out how tiny islands of magnetic material align themselves when
sorted on a regular lattice - by measurements at BESSY II. Contrary to
expectations, the north and south poles of ... today Nanowerk
[url: http://www.nanowerk.com/news2/newsid=30517.php]





Featured Event

MEMS Executive Congress US 2013[1] MEMS Executive Congress is the
preeminent annual conference and networking event for the MEMS industry.
It is a unique professional forum at which executives from companies
designing and manufacturing MEMS technology sit side-by-side with their
end-user customers in panel discussions and networking events to
exchange ideas and information about the use of MEMS in commercial
applications. By creating an intimate forum for decision-makers, the
goal of the Congress is to define, collaborate on, and grow the global
MEMS market by connecting the MEMS supply chain with end-users and
potential end-users of MEMS.

MEMS Event Calendar:

11th Annual MEPTEC MEMS Technology Symposium
[url: http://meptec.org/meptec11thannual.html]
2013-05-22
San Jose, CA
MEMS-enabled e-health revolution !

Workshop on Nano and Micro Manufacturing
[url: http://nano-microworkshop.com]
2013-05-22 - 2013-05-23
Dearborn, MI
Nano and micro workshop concentrating on end users and manufacturers

MEMS Business Forum 2013
[url: http://memsforum2013.com/index.html]
2013-05-23
San Jose, CA

ECTC 2013 (Electronic Components and Technology Conference)
[url: http://www.ectc.net/]
2013-05-28 - 2013-05-31
Las Vegas, NV

EIPBN (3-Beams) Conference
[url: http://eipbn.org/home-page/]
2013-05-28 - 2013-05-31
Nashville, TN

Design Automation Conference (DAC) 2013
[url: http://www.dac.com/default.aspx?utm_source=MEMS&amp;utm_medium=banner&amp;utm_content=125x60&amp;utm_campaign=Registration]
2013-06-02 - 2013-06-06
Austin, Texas
Celebrating 50 Years ! 

International Microwave Symposium (IMS)
[url: http://www.ims2013.org/]
2013-06-02 - 2013-06-07
Seattle, Washington
Join top engineers and scientists in the RF &amp; Microwave Field at IMS!

Sensors Expo and Conference
[url: http://www.sensorsmag.com/sensors-expo]
2013-06-05 - 2013-06-06
Rosemont, IL 
Sensing Technologies Driving Tomorrow&#39;s Solutions

Transducers  2013 &amp; Eurosensors XXVII
[url: http://transducers-eurosensors2013.org/]
2013-06-16 - 2013-06-20
Barcelona, Spain
The 17th International Conference on Solid-State Sensors, Actuators and Microsystems

Micro- and Nano-electromechanical Switches
[url: http://www.memsindustrygroup.org/i4a/pages/index.cfm?pageid=3446]
2013-06-18
Online 11:30 AM ET, 8:30 AM PT
A Detailed Look into these Promising Technologies

AVS 60th International Symposium &amp; Exhibition
[url: http://www2.avs.org/symposium/AVS60/pages/call_abstract.html]
2013-10-27 - 2013-11-01
Long Beach, CA

MicroTAS 2013
[url: http://www.microtas2013.org/]
2013-10-27 - 2013-10-31
Freiburg, Germany
The 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences

MIG MEMS Executive Congress U.S.
[url: http://www.memscongress.com]
2013-11-07 - 2013-11-08
Napa, CA
Meet your next customer at MEMS Executive Congress! 

SPIE Photonics West 2014
[url: http://spie.org/RPW142MEMBVE]
2014-02-01 - 2014-02-06
San Francisco, CA

MEMS Express from MNX

MEMS News — 2013-05-14T19:53:47

View Mailing Online [url: http://www.memsnet.org/news/mailings/894/]


MEMS Express is brought to you by MNX [url: http://www.mems-exchange.org]:
your microsystem design and fabrication partner



MEMS technology

How to improve heat dissipation in 3-D microelectronic systems
“What we are talking about here is boiling that will take place in
passages that are produced by microfabrication techniques that may be
only 50 micrometers by 50 micrometers. The physics of what will be going
on there is very different than what ... today Design World Network
[url: http://www.designworldonline.com/how-to-improve-heat-dissipation-in-3-d-microelectronic-systems/]

First precise MEMS output measurement technique unveiled - R&amp;amp;D Magazine
This is an example of a MEMS device whose accurate resonant frequency
was measured by the The commercial application of MEMS, or
microelectromechanical systems, will receive a major boost today
following the presentation of a brand new way to ... today R &amp; D Magazine
[url: http://www.rdmag.com/news/2013/05/first-precise-mems-output-measurement-technique-unveiled]

What are &amp;#39;appcessories&amp;#39; and why should we care about them? - Network World
But advances in plastic moulding, solid state fabrication and
Microelectromechanical systems (MEMS) make it impossible to anticipate
all the potential combination of various sensors and control logic and
their applications that could be included in a ... today Network World
[url: http://www.networkworld.com/community/node/83037]

Lab-on-a-chip rises to cola challenge
The great taste of fluorescence has allowed researchers in Finland to
develop a microfluidics device that can analyse complex unknowns in a
liquid using microfluidics. The electronic tongue is able to tell the
difference between colas, as well as ... yesterday Chemistry World
[url: http://www.rsc.org/chemistryworld/2013/05/lab-chip-cola-challenge-fingerprint]

Agilent Technologies New AFM/Raman Spectroscopy System Provides ...
The combination enables researchers to go beyond the optical diffraction
limit to achieve nanoscale resolution as they perform Raman
spectroscopy. “Key capabilities of this new high-precision system
include AFM/Raman co-localization, tip-enhanced ... yesterday Azom.com
[url: http://www.azom.com/news.aspx?newsID=36720]

NICE! the brain as a model for future supercomputers
As Julia Phillips, Sandia vice president and chief technology officer,
put it in her opening talk, &quot;Neuro-inspired computing is at the
intersection of cognitive science and technology, nano devices,
microsystems and computer and information sciences. today Phys.Org
[url: http://phys.org/news/2013-05-nice-brain-future-supercomputers.html]

Plasmonic-Enhanced Organic PV Materials Less Expensive Than Traditional ...
... in nanphotonics, biophotonics, hybrid inorganic/organic materials
and devices, nonlinear and fiber optics, metamaterials, nanoplasmonics,
optofluidics, microelectromechanical systems (MEMS), biomedical
microelectromechanical systems (BioMEMs), ... today AZoNano.com
[url: http://www.azonano.com/news.aspx?newsID=27340]


MEMS business

Teledyne Dalsa acquires Dutch semiconductor firm
... a valuable strengthening of our design capabilities across the
company, complementing our existing expertise in CMOS image sensor
design, high voltage driver chips for MEMS (micro-electro-mechanical
systems) and embedded software development.” ... yesterday Waterloo Record
[url: http://www.therecord.com/news/business/article/933206--teledyne-dalsa-acquires-dutch-semiconductor-firm]

Who&amp;#39;s Driving the MEMS Evolution Revolution Now? (Part 3 of 3 ...
It is my pleasure to present the conclusion of the Guest blog trilogy on
the MEMS Evolution Revolution, written by my colleague, and long-time
MEMS industry insider, Howard Wisniowski. So far in this series, Howard
has ... MEMS Industry Group yesterday
[url: http://memsblog.wordpress.com/2013/05/13/whos-driving-the-mems-evolution-revolution-now-part-3-of-3/]

BCC Research Expects Global Market for Sensors to Reach Nearly $116.1 ...
Development of new applications for technologies such as
microelectromechanical systems (MEMS), optoelectronics, and
photoelectronics will help grow the sensor market. The maturity of many
sensor markets and improved fabrication techniques has led to ... yesterday Watch List News (press release)
[url: http://www.watchlistnews.com/2013/05/14/bcc-research-expects-global-market-for-sensors-to-reach-nearly-116-1-billion-by-2019/]

Silex Partners in ENIAC Processes for MEMS by Inkjet Enhanced Technologies ...
Silex Microsystems, the world&#39;s largest pure-play MEMS foundry, today
announced that it has joined an international European Union-funded
program aimed at developing a new MEMS manufacturing platform based on
advanced inkjet-based printing ... today AZoNano.com
[url: http://www.azonano.com/news.aspx?newsID=27343]

LLNL and Cool Earth Solar receive $1.7 million for renewable energy ...
This project will demonstrate on a micro scale a model that could be
expanded and replicated. Utilities are increasingly concerned by the
effect solar intermittency has on load across the grid and its potential
to unbalance power generation and demand ... today Phys.Org (press release)
[url: http://phys.org/wire-news/129998736/llnl-and-cool-earth-solar-receive-17-million-for-renewable-energ.html]


Nanotechnology

Metallic Glass: How Nanoscale Islands React Under Strain
Zhang explains that the nanoscale lengths of STZs are reminiscent of &#39;defects&#39;
seen in crystalline metals, and their positive correlation with the
Poisson&#39;s ratio of a material can help predict fracture problems. Their
calculations showed that bigger ... yesterday Science Daily (press release)
[url: http://www.sciencedaily.com/releases/2013/05/130513114958.htm]

A Nanoscale Peak at Lithium-air Batteries Promise Better Electric Vehicles
A Nanoscale Peak at Lithium-air Batteries Promise Better Electric
Vehicles. By Dexter Johnson. Posted 14 May 2013 | 18:21 GMT. Share; |;
Email; |; Print. Researchers at MIT and Sandia National Laboratory have
made some long-awaited progress in ... today IEEE Spectrum
[url: http://spectrum.ieee.org/nanoclast/green-tech/advanced-cars/nanoscale-peak-at-lithiumair-batteries-promise-better-electric-vehicles]

The University of Wyoming uses Nanoparticle Tracking Analysis to characterize ...
Dr Jonathan Brant is leader of the group, &quot;Interfaces in the
Environment: membranes, particles and nanotechnology&quot; in the College of
Engineering and Applied Science at the University of Wyoming. The group
focuses on problems associated with ... today Nanotechnology News (press release)
[url: http://www.nanotech-now.com/news.cgi?story_id=47450]





Featured Event

Design Automation Conference (DAC) 2013[1] The Design Automation
Conference (DAC) is celebrating 50 years as the leading technical
conference and tradeshow on electronic design automation, embedded
systems and software. DAC features 175+ exhibits and 300+ presentations
covering the latest in design methodologies, embedded software and EDA
tool developments. Registration opens March 29th[2]!

MEMS Event Calendar:

Nanotech Conference &amp; Expo
[url: http://www.techconnectworld.com/Nanotech2013/]
2013-05-12 - 2013-05-15
Washington DC

11th Annual MEPTEC MEMS Technology Symposium
[url: http://meptec.org/meptec11thannual.html]
2013-05-22
San Jose, CA
MEMS-enabled e-health revolution !

Workshop on Nano and Micro Manufacturing
[url: http://nano-microworkshop.com]
2013-05-22 - 2013-05-23
Dearborn, MI
Nano and micro workshop concentrating on end users and manufacturers

MEMS Business Forum 2013
[url: http://memsforum2013.com/index.html]
2013-05-23
San Jose, CA

ECTC 2013 (Electronic Components and Technology Conference)
[url: http://www.ectc.net/]
2013-05-28 - 2013-05-31
Las Vegas, NV

EIPBN (3-Beams) Conference
[url: http://eipbn.org/home-page/]
2013-05-28 - 2013-05-31
Nashville, TN

Design Automation Conference (DAC) 2013
[url: http://www.dac.com/default.aspx?utm_source=MEMS&amp;utm_medium=banner&amp;utm_content=125x60&amp;utm_campaign=Registration]
2013-06-02 - 2013-06-06
Austin, Texas
Celebrating 50 Years ! 

International Microwave Symposium (IMS)
[url: http://www.ims2013.org/]
2013-06-02 - 2013-06-07
Seattle, Washington
Join top engineers and scientists in the RF &amp; Microwave Field at IMS!

Sensors Expo and Conference
[url: http://www.sensorsmag.com/sensors-expo]
2013-06-05 - 2013-06-06
Rosemont, IL 
Sensing Technologies Driving Tomorrow&#39;s Solutions

Transducers  2013 &amp; Eurosensors XXVII
[url: http://transducers-eurosensors2013.org/]
2013-06-16 - 2013-06-20
Barcelona, Spain
The 17th International Conference on Solid-State Sensors, Actuators and Microsystems

Micro- and Nano-electromechanical Switches
[url: http://www.memsindustrygroup.org/i4a/pages/index.cfm?pageid=3446]
2013-06-18
Online 11:30 AM ET, 8:30 AM PT
A Detailed Look into these Promising Technologies

AVS 60th International Symposium &amp; Exhibition
[url: http://www2.avs.org/symposium/AVS60/pages/call_abstract.html]
2013-10-27 - 2013-11-01
Long Beach, CA

MicroTAS 2013
[url: http://www.microtas2013.org/]
2013-10-27 - 2013-10-31
Freiburg, Germany
The 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences

MIG MEMS Executive Congress U.S.
[url: http://www.memscongress.com]
2013-11-07 - 2013-11-08
Napa, CA
Meet your next customer at MEMS Executive Congress! 

SPIE Photonics West 2014
[url: http://spie.org/RPW142MEMBVE]
2014-02-01 - 2014-02-06
San Francisco, CA

MEMS Express from MNX

MEMS News — 2013-05-13T19:09:38

View Mailing Online [url: http://www.memsnet.org/news/mailings/893/]


MEMS Express is brought to you by MNX [url: http://www.mems-exchange.org]:
your microsystem design and fabrication partner



MEMS technology

Optical Gratings Could Make Quantum Tech Portable
While advances have been made in producing portable sensors, simplifying
atomic cooling and loading using microfabrication techniques has proved
difficult, the researchers said. Their work addresses the problem by
delivering &quot;ten thousand times more ... 2013-05-10 Photonics.com
[url: http://www.photonics.com/Article.aspx?AID=53866]

Industrial Picosecond Laser suits micromachining applications.
Santa Clara, CA – Spectra-Physics®, a Newport Corporation brand,
introduces Spirit™ ps 1040-10, an industrial-grade picosecond laser for
precision micromachining applications. The new laser delivers high
finesse with exceptional beam quality (M2&lt; 1.2 ... 2013-05-10 ThomasNet Industrial News Room
[url: http://news.thomasnet.com/fullstory/Industrial-Picosecond-Laser-suits-micromachining-applications-20008147]

Applications of Metal Cyclopentadienyl CVD/ALD Precursors - AZoNano
The precise control of film formation has rendered ALD highly attractive
for thin film applications in microelectronic devices such as
ferroelectric memories, radiation detectors, switches, integrated
circuits, MEMS and as new high-k gate dielectrics ... 2013-05-10 AZoNano.com
[url: http://www.azonano.com/article.aspx?ArticleID=3430]

Applications of Metal Carbonyl Precursors for CVD and ALD Processes - AZoNano
Its clients include academic, industrial and government research and
development laboratories as well as commercial scale businesses in the
pharmaceutical, microelectronic and chemical / petrochemical industries.
Strem Chemicals also provides custom ... 2013-05-10 AZoNano.com
[url: http://www.azonano.com/article.aspx?ArticleID=3429]

Micromachining: Inclinations Sounded out
These devices are fabricated using silicon micromachining technology, so
the components are very compact and can be conveniently integrated with
standard electronics components, which are also based on silicon. &quot;Our
main goal was to explore a new ... today Science Daily (press release)
[url: http://www.sciencedaily.com/releases/2013/05/130513114952.htm]

Ingestible, Implantable, Or Intimate Contact: How Will You Take Your ...
one centered on an implantable micromachine sensor. If you or your
doctor feel your health is at risk, I suspect you&#39;d accept these inside
your body. If your health feels not at risk ... today Singularity Hub
[url: http://singularityhub.com/2013/05/13/ingestible-implantable-or-intimate-contact-how-will-you-take-your-microscale-body-sensors/]

Solar Panels as Inexpensive as Paint?
... in nanphotonics, biophotonics, hybrid inorganic/organic materials
and devices, nonlinear and fiber optics, metamaterials, nanoplasmonics,
optofluidics, microelectromechanical systems (MEMS), biomedical
microelectromechanical systems (BioMEMs), ... today Science Daily (press release)
[url: http://www.sciencedaily.com/releases/2013/05/130513103657.htm]

Insulating Magnets Control Neighbor&amp;#39;s Conduction
Magnetoresistance is an important material property that is utilized in
electronic compasses, hard disk drives, biosensors, and
microelectromechanical systems (MEMS). In normal (nonmagnetic)
conductors, magnetoresistance is a variation of the ... today Physics
[url: http://physics.aps.org/articles/v6/56]


MEMS business

Combo MEMS inertial sensors report brisk growth in automotive market
Combo MEMS sensors for automotive applications are off to another
exhilarating ride this year as revenue continues to climb, spurred by
rapidly accelerating use in car safety systems, according to an IHS
iSuppli MEMS and Sensors Report from information ... today ElectroIQ
[url: http://www.electroiq.com/articles/sst/2013/05/combo-mems-inertial-sensors-report-brisk-growth-in-automotive-ma.html]

Silex joins ENIAC project to develop new solutions for TSV and wafer bonding
Silex Microsystems, the world&#39;s largest pure-play MEMS foundry, today
announced that it has joined an international European Union-funded
program aimed at developing a new MEMS manufacturing platform based on
advanced inkjet-based printing ... today ElectroIQ
[url: http://www.electroiq.com/articles/sst/2013/05/silex-joins-eniac-project-to-develop-new-solutions-for-tsv-and-w.html]

Who&amp;#39;s Driving the MEMS Evolution Revolution Now? (Part 3 of 3)
Micro-electromechanical system (MEMS) timing devices are one good
example. MEMS Oscillators MEMS-based oscillators are an emerging class
of highly miniaturized, batch manufacturable timing devices that are
more rugged, use less power and are more ... today ElectroIQ (blog)
[url: http://www.electroiq.com/blogs/mems-industry-group-blog/2013/05/who-s-driving-the-mems-evolution-revolution-now-part-3-of-3.html]


Nanotechnology

Injectable nanoscale-particles network to control blood sugar - Digital Journal
In a promising development for diabetes treatment, researchers have
developed a network of nanoscale particles that can be injected into the
body and release insulin when blood-sugar levels rise, maintaining
normal blood sugar levels for more than a week. 2013-05-11 DigitalJournal.com
[url: http://www.digitaljournal.com/article/349973]


Nanotech business

DARPA awards $6 million to develop nanotechnology therapies for traumatic ...
DARPA hopes to meet these challenges with nanotechnology. The agency
awarded this grant under its In Vivo Nanoplatforms for Therapeutics
program to construct nanoparticles that can find and treat infections
and other damage associated with traumatic ... 2013-05-10 Nanowerk
[url: http://www.nanowerk.com/news2/newsid=30442.php]



Featured Event

International Microwave Symposium (IMS)[1] The IEEE MTT International
Microwave Symposium is the premier annual international meeting for
technologists involved in all aspects of microwave theory and practice.
It consists of a full week of events, including technical paper
presentations, workshops, and tutorials, as well as a full set of social
events. The symposium also hosts a huge commercial exhibition, organized
by MP Associates.

MEMS Event Calendar:

Nanotech Conference &amp; Expo
[url: http://www.techconnectworld.com/Nanotech2013/]
2013-05-12 - 2013-05-15
Washington DC

Mid-Atlantic Micro/Nano Alliance Spring Symposium
[url: http://www.midatlanticmana.com/]
2013-05-14
NIST, Gaithersburg MD
&quot;Microsystems Technology: Fulfilling the Promise&quot;

11th Annual MEPTEC MEMS Technology Symposium
[url: http://meptec.org/meptec11thannual.html]
2013-05-22
San Jose, CA
MEMS-enabled e-health revolution !

Workshop on Nano and Micro Manufacturing
[url: http://nano-microworkshop.com]
2013-05-22 - 2013-05-23
Dearborn, MI
Nano and micro workshop concentrating on end users and manufacturers

MEMS Business Forum 2013
[url: http://memsforum2013.com/index.html]
2013-05-23
San Jose, CA

ECTC 2013 (Electronic Components and Technology Conference)
[url: http://www.ectc.net/]
2013-05-28 - 2013-05-31
Las Vegas, NV

EIPBN (3-Beams) Conference
[url: http://eipbn.org/home-page/]
2013-05-28 - 2013-05-31
Nashville, TN

Design Automation Conference (DAC) 2013
[url: http://www.dac.com/default.aspx?utm_source=MEMS&amp;utm_medium=banner&amp;utm_content=125x60&amp;utm_campaign=Registration]
2013-06-02 - 2013-06-06
Austin, Texas
Celebrating 50 Years ! 

International Microwave Symposium (IMS)
[url: http://www.ims2013.org/]
2013-06-02 - 2013-06-07
Seattle, Washington
Join top engineers and scientists in the RF &amp; Microwave Field at IMS!

Sensors Expo and Conference
[url: http://www.sensorsmag.com/sensors-expo]
2013-06-05 - 2013-06-06
Rosemont, IL 
Sensing Technologies Driving Tomorrow&#39;s Solutions

Transducers  2013 &amp; Eurosensors XXVII
[url: http://transducers-eurosensors2013.org/]
2013-06-16 - 2013-06-20
Barcelona, Spain
The 17th International Conference on Solid-State Sensors, Actuators and Microsystems

AVS 60th International Symposium &amp; Exhibition
[url: http://www2.avs.org/symposium/AVS60/pages/call_abstract.html]
2013-10-27 - 2013-11-01
Long Beach, CA

MicroTAS 2013
[url: http://www.microtas2013.org/]
2013-10-27 - 2013-10-31
Freiburg, Germany
The 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences

MIG MEMS Executive Congress U.S.
[url: http://www.memscongress.com]
2013-11-07 - 2013-11-08
Napa, CA
Meet your next customer at MEMS Executive Congress! 

SPIE Photonics West 2014
[url: http://spie.org/RPW142MEMBVE]
2014-02-01 - 2014-02-06
San Francisco, CA

[mems-talk] UV 26-3.0

Jocelyn Ng — 2013-05-10T07:31:11

Dear all,

I'm currently using photoresists uv26. I need to reflow the resist. But I tried several temperature still it couldn't hit the profile I want. At lower temperature like 165C the reflow is not enough; when I try to go higher like 180C the resist burnt. 
Any comments or advice about this photoresists is very much welcomed.

Thank you in advance.

Best Regards,
Jocelyn

Sent from my iPhone
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MEMS Express from MNX

MEMS News — 2013-05-09T19:23:50

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MEMS technology

New Device Uses Microtips for Quick DNA Extraction from Liquid Samples (w ...
The tiny probes, called microtips and nanotips, were designed and built
at the UW in a micro-fabrication facility where a technician can make up
to 1 million tips in a year, which is key in proving that large-scale
production is feasible, [Jae-Hyun ... yesterday Medgadget.com
[url: http://www.medgadget.com/2013/05/new-device-uses-microtips-for-quick-dna-extraction-from-liquid-samples-wvideo.html]

QM researchers lead trial of revolutionary new device-based treatment for high ...
... in biomarker discovery (“pathogen-specific fingerprints”) which
require minimal sample processing steps, nano-enabled sensors,
temperature-stable biomimetic capture coatings, nanoparticles,
microelectronics, microfluidics, wireless networks, data ... today HealthCanal.com
[url: http://www.healthcanal.com/medical-breakthroughs/38446-qm-researchers-lead-trial-of-revolutionary-new-device-based-treatment-for-high-blood-pressure.html]

Brown University Researchers Create Technique to Guide Nerve Growth for ...
Using Brown&#39;s microfabrication facility, Lopez-Fagundo patterned their
designs on silicon wafers (like those used to make computer chips) and
then transferred them to silicone squares about a centimeter on a side
so that the ellipses and processes were ... today Medgadget.com
[url: http://www.medgadget.com/2013/05/brown-creates-technique-to-guide-nerve-growth-for-neuro-implants.html]

Gadget Freak Case #240: MEMS Mics Up Telescope
Jerald Cogswell mounted a precision MEMS microphone in a satellite dish&#39;s
focal point so it can feed its signal to an amplifier that enables
simultaneous recording and monitoring via headphones. Build Instructions
· Read more Gadget Freak cases here ... today Design News
[url: http://www.designnews.com/author.asp?section_id=1362&amp;doc_id=263087&amp;f_src=designnews_gnews]

Your phone knows the three places you visit each day - PhysOrg.com
Such micro-scale information can be important: the distance between the
dock and the jury box in a courtroom may be small, but it is
significant. What does this mean, then? The results of the Interface
paper have implications for many applications ... today Phys.Org
[url: http://phys.org/news/2013-05-day.html]


MEMS business

MEMS accelerometers and gyros on a roll
Since the 1990s, the use of MEMS-based accelerometers and gyroscope
devices has expanded from automotive safety systems (primarily in
car-crash airbag triggers and electronic stability controls for steering
and braking) to new sensing applications in ... today ElectronicsWeekly.com
[url: http://www.electronicsweekly.com/news/business/mems-accelerometers-and-gyros-on-a-roll-2013-05/]

New NIST measurement tool is on target for the fast-growing MEMS industry
The NIST-developed test chips (Reference Materials 8096 and 8097) are
quality assurance tools that enable accurate, reliable comparisons of
measurements on MEMS (MicroElectroMechanical Systems) devices made with
different equipment and by ... yesterday Space Daily
[url: http://www.spacedaily.com/reports/New_NIST_measurement_tool_is_on_target_for_the_fast_growing_MEMS_industry_999.html]

InfiniLED: Micro-LED start-up
It works by micromachining the surface of GaN wafers to leave parabolic
mounds. Careful control of dimensions means an LED junction remains on
top of each mound, with the parabola focussing its light through the
transparent wafer and out the other side. today ElectronicsWeekly.com
[url: http://www.electronicsweekly.com/news/business/infiniled-micro-led-start-up-2013-05/]


Nanotechnology

Scientists develop device for portable, ultra-precise clocks and quantum sensors
Their research has been published in the journal Nature Nanotechnology,
where it is featured on the front cover. Many of the most accurate
measurement devices, including atomic clocks, work by observing how
atoms transfer between individual quantum ... today Nanotechnology News (press release)
[url: http://www.nanotech-now.com/news.cgi?story_id=47426]

Metallic glass: How nanoscale islands react under strain - PhysOrg.com
Zhang explains that the nanoscale lengths of STZs are reminiscent of &#39;defects&#39;
seen in crystalline metals, and their positive correlation with the
Poisson&#39;s ratio of a material can help predict fracture problems. Their
calculations showed that bigger ... yesterday Phys.Org
[url: http://phys.org/news/2013-05-metallic-glass-nanoscale-islands-react.html]





Featured Event

AVS 60th International Symposium &amp; Exhibition[1] The AVS International
Symposium and Exhibition addresses cutting-edge issues associated with
materials, processing, and interfaces in both the research and
manufacturing communities. The weeklong Symposium fosters a
multidisciplinary environment that cuts across traditional boundaries
between disciplines, featuring papers from AVS technical divisions,
technology groups, and focus topics on emerging technologies. The
equipment exhibition is one of the largest in the world and provides an
excellent opportunity to view the latest products and services offered
by over 200 participating companies. More than 2,000 scientists and
engineers gather from around the world to attend.

MEMS Event Calendar:

MIG M2M Forum
[url: https://www.eiseverywhere.com/ehome/44568]
2013-05-08 - 2013-05-09
Boston, MA
The annual members&#39; meeting of MEMS Industry Group. 

Nanotech Conference &amp; Expo
[url: http://www.techconnectworld.com/Nanotech2013/]
2013-05-12 - 2013-05-15
Washington DC

Mid-Atlantic Micro/Nano Alliance Spring Symposium
[url: http://www.midatlanticmana.com/]
2013-05-14
NIST, Gaithersburg MD
&quot;Microsystems Technology: Fulfilling the Promise&quot;

11th Annual MEPTEC MEMS Technology Symposium
[url: http://meptec.org/meptec11thannual.html]
2013-05-22
San Jose, CA
MEMS-enabled e-health revolution !

Workshop on Nano and Micro Manufacturing
[url: http://nano-microworkshop.com]
2013-05-22 - 2013-05-23
Dearborn, MI
Nano and micro workshop concentrating on end users and manufacturers

MEMS Business Forum 2013
[url: http://memsforum2013.com/index.html]
2013-05-23
San Jose, CA

ECTC 2013 (Electronic Components and Technology Conference)
[url: http://www.ectc.net/]
2013-05-28 - 2013-05-31
Las Vegas, NV

EIPBN (3-Beams) Conference
[url: http://eipbn.org/home-page/]
2013-05-28 - 2013-05-31
Nashville, TN

Design Automation Conference (DAC) 2013
[url: http://www.dac.com/default.aspx?utm_source=MEMS&amp;utm_medium=banner&amp;utm_content=125x60&amp;utm_campaign=Registration]
2013-06-02 - 2013-06-06
Austin, Texas
Celebrating 50 Years ! 

International Microwave Symposium (IMS)
[url: http://www.ims2013.org/]
2013-06-02 - 2013-06-07
Seattle, Washington
Join top engineers and scientists in the RF &amp; Microwave Field at IMS!

Sensors Expo and Conference
[url: http://www.sensorsmag.com/sensors-expo]
2013-06-05 - 2013-06-06
Rosemont, IL 
Sensing Technologies Driving Tomorrow&#39;s Solutions

Transducers  2013 &amp; Eurosensors XXVII
[url: http://transducers-eurosensors2013.org/]
2013-06-16 - 2013-06-20
Barcelona, Spain
The 17th International Conference on Solid-State Sensors, Actuators and Microsystems

AVS 60th International Symposium &amp; Exhibition
[url: http://www2.avs.org/symposium/AVS60/pages/call_abstract.html]
2013-10-27 - 2013-11-01
Long Beach, CA

MicroTAS 2013
[url: http://www.microtas2013.org/]
2013-10-27 - 2013-10-31
Freiburg, Germany
The 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences

MIG MEMS Executive Congress U.S.
[url: http://www.memscongress.com]
2013-11-07 - 2013-11-08
Napa, CA
Meet your next customer at MEMS Executive Congress! 

SPIE Photonics West 2014
[url: http://spie.org/RPW142MEMBVE]
2014-02-01 - 2014-02-06
San Francisco, CA

Re: [mems-talk] Properties of Ca modified Lead Titanate

Azeem Zulfiqar — 2013-05-09T16:49:52

try www.matweb.com



On Thu, May 9, 2013 at 4:48 AM, Md A Muztoba
<mamuztoba11< at >students.desu.edu>wrote:

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Re: [mems-talk] [!! SPAM] Re: Resist thickness for nitride etch

Robert Ditizio — 2013-05-09T17:50:42

Ahmad:

Typical etch chemistries for SiN will attack the PR as well. You are seeing profilometry step heights of <2.4um because you are removing some of the PR as well as the 0.4um SiN layer.  You would need to strip the remaining PR and take another profilomtery measurement to get an accurate measure of the SiN/Si step height. (The SiN etch will likely etch the underlying Si as well as the SiN.) Typical etch selectivites for fluorine-based SiN-etch chemistries are in the range of 1-2:1, so you'd expect to remove about 2600-5200A of the PR for a 130% etch. 

To address your original question about how much PR is required, the 2um PR thickness should be sufficient.  For the typical SiN/PR selectivities in the range of 1-2:1 (SiN/PR), the 2um thickness gives you some overhead to maintain your edge profile.  At some point though, you may need to include other characteristics of your etch, such as profile angle and residues to determine if your process is acceptable.

Robert
   

-----Original Message-----
From: mems-talk-bounces+rditizio=tegal.com< at >memsnet.org [mailto:mems-talk-bounces+rditizio=tegal.com< at >memsnet.org] On Behalf Of Haider, Ahmad M
Sent: Wednesday, May 08, 2013 9:15 PM
To: Lou Chomas
Cc: mems-talk< at >memsnet.org
Subject: [!! SPAM] Re: [mems-talk] Resist thickness for nitride etch

Thanks Lou, I got that. 
The thing is that my Si wafer has a SiN layer on top of which 2 um resist acts a mask. I want to do a plasma(Oxford endpoint RIE) etch exposed portions of SiN (and not Si beneath it). The exposed SiN layer is 400 nm thick and consists of a series of 25 um squares. Overall, if the whole exposed SiN is etched, I should get a step depth of 2.4 um on the profilometer. I etch for 130% of the required etch time to etch all 400 nm of nitride. However, when I measure the step depth on profilometer, it always shows me that the depth is less than 2.4 um. I can't fathom the reason behind it. Could it be because my features are very small?

Thanks
Ahmad

----- Original Message -----
From: "Lou Chomas" <lchomas< at >hotmail.com>
To: "Ahmad M Haider" <ahaider3< at >gatech.edu>
Sent: Thursday, May 9, 2013 12:00:18 AM
Subject: RE: [mems-talk] Resist thickness for nitride etch

Hi Ahmad,     If the layer under the nitride or resist that you are measuring is also etched (silicon, oxide, etc.)  you will measure a step that is the etch through the material plus the etch into the substrate.  So, if you etch just resist and then measure the thickness before and after, you will need to then strip the resist and measure the amount of etch into the substrate and subtract it.
-Lou

Re: [mems-talk] Resist thickness for nitride etch

Andrew Sarangan — 2013-05-09T17:04:07

Once the nitride film is etched, fluorine will etch the silicon substrate
very fast, so measurements need to account for that.


On Wed, May 8, 2013 at 11:33 PM, Haider, Ahmad M <ahaider3< at >gatech.edu>wrote:

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Re: [mems-talk] Resist thickness for nitride etch

MRC gmail — 2013-05-08T21:26:22

Hi Ahmad.
I assume that you mean Silicon nitride layer.
It depends on what kind of gas and condition do you use but typically 
in my case more than 2 times thickness of conventional Photo resist 
layer was enough to endure etch process.
With CF4 gas (RF power ~60W, pressure ~60mtorr, ?? SCCM , RIE 2000 
South bay tech.)

Best.

Myung Rae Cho
PhD. candidate
Department of Physics & Astronomy
Seoul National University
Seoul 151-747 Korea
Tel: +82-2-885-2361
Fax: +82-2-882-2361
mobile: +82-10-6475-5495
insammael< at >gmail.com
insammael< at >ydplab.snu.ac.kr

On Thu May  9 05:29:49 2013, Haider, Ahmad M wrote:
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Re: [mems-talk] Resist thickness for nitride etch

Andrew Sarangan — 2013-05-08T20:47:42

It depends on how thick your nitride is, and what chemistry you are using.
I can get about a 1:1 etch selectivity between a positive hard baked resist
and LPCVD silicon nitride, using CF4/O2 in a pure RIE mode.


On Wed, May 8, 2013 at 4:29 PM, Haider, Ahmad M <ahaider3< at >gatech.edu> wrote:

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Re: [mems-talk] Resist thickness for nitride etch

Haider, Ahmad M — 2013-05-09T04:15:21

Thanks Lou, I got that. 
The thing is that my Si wafer has a SiN layer on top of which 2 um resist acts a mask. I want to do a plasma(Oxford endpoint RIE) etch exposed portions of SiN (and not Si beneath it). The exposed SiN layer is 400 nm thick and consists of a series of 25 um squares. Overall, if the whole exposed SiN is etched, I should get a step depth of 2.4 um on the profilometer. I etch for 130% of the required etch time to etch all 400 nm of nitride. However, when I measure the step depth on profilometer, it always shows me that the depth is less than 2.4 um. I can't fathom the reason behind it. Could it be because my features are very small?

Thanks
Ahmad

----- Original Message -----
From: "Lou Chomas" <lchomas< at >hotmail.com>
To: "Ahmad M Haider" <ahaider3< at >gatech.edu>
Sent: Thursday, May 9, 2013 12:00:18 AM
Subject: RE: [mems-talk] Resist thickness for nitride etch

Hi Ahmad,     If the layer under the nitride or resist that you are measuring is also etched (silicon, oxide, etc.)  you will measure a step that is the etch through the material plus the etch into the substrate.  So, if you etch just resist and then measure the thickness before and after, you will need to then strip the resist and measure the amount of etch into the substrate and subtract it.
-Lou

Re: [mems-talk] Resist thickness for nitride etch

Haider, Ahmad M — 2013-05-09T03:33:17

Hi Lou,

What do you mean by "Be careful to account for any etching into the substrate if you are using a profilometer to measure the thickness." I use the dektak profilometer to measure the thickness in order to verify if the RIE plasma etcher was able to remove all exposed silicon nitride.

Thanks,
Ahmad

----- Original Message -----
From: "Lou Chomas" <lchomas< at >hotmail.com>
To: "General MEMS discussion" <mems-talk< at >memsnet.org>
Sent: Wednesday, May 8, 2013 5:09:30 PM
Subject: Re: [mems-talk] Resist thickness for nitride etch

Ahmad,    That depends a lot on your process.  I would recommend putting some resist down with your pattern on a test wafer and etching for some amount of time.  Pick something less than your total etch, but not too short.  Measure the thickness of the resist before and after and then you can calculate whether the thickness will be sufficient.  Be careful to account for any etching into the substrate if you are using a profilometer to measure the thickness.  If your recipe has a lot of oxygen, the rate against the resist will likely be very high.
-Lou

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[mems-talk] Properties of Ca modified Lead Titanate

Md A Muztoba — 2013-05-09T02:48:43

Hello all,
I need to know the specific heat, thermal conductivity, density, young modulas and Poisson ratio of Ca modified Lead Titanate for finite element analysis.
Any link/source to this kind of information will be greatly appreciated.
Thanks.
Muztoba
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Re: [mems-talk] electroform station

Dave Roberts — 2013-05-08T23:34:34

Hi Hong,
The wafer cathode holder is critical in electroforming. The contacts must
be sealed off from the plating solution to avoid being welded to your
wafer. Also, a current thief must be used to obtain uniformity. I can help
you with plating tools.

Regards,
Dave

David Roberts (Principal)
Silicon Valley Wafer Plating
Santa Clara, CA (408)469-3203
www.waferplating.com





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Re: [mems-talk] Resist thickness for nitride etch

Lou Chomas — 2013-05-08T21:09:30

Ahmad,    That depends a lot on your process.  I would recommend putting some resist down with your pattern on a test wafer and etching for some amount of time.  Pick something less than your total etch, but not too short.  Measure the thickness of the resist before and after and then you can calculate whether the thickness will be sufficient.  Be careful to account for any etching into the substrate if you are using a profilometer to measure the thickness.  If your recipe has a lot of oxygen, the rate against the resist will likely be very high.
-Lou
       
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